Departments
Studying the influence of proton irradiation on the distribution profile of Pt and Cr in surface layers n-Si˂Pt˃, n-Si˂Сr˃ using ellipsometric spectroscopy
- Department: DNP (ОЯФ)
- Author: Doroshkevich/Дорошкевич A. S., Isaev/Исаев R. S., Tuan/Туан P. L.
- Year: 2024
-
DOI:
https://doi.org/10.62476/apr62.83
- REFERENCES: Sh.B. Utamuradova, D.A. Rakhmanov, P.L. Tuan, A.S. Doroshkevich, R.Sh. Isayev, A.S. Abiyev, Studying the influence of proton irradiation on the distribution profile of Pt and Cr in surface layers n-Si?Pt?, n-Si?Сr? using ellipsometric spectroscopy Advanced Physical Research, Vol.6, No.2, 2024, pp.83-89
Sh.B. Utamuradova, D.A. Rakhmanov (Institute of Semiconductor Physics and Microelectronics at the National University of Uzbekistan, Tashkent, Uzbekistan); A.S. Abiyev (Western Caspian University, Baku, Azerbaijan)