Department: DNICM (НЭОНИКС)
Year: 2022
DOI: DOI https://doi.org/10.1016/j.mssp.2022.106961
REFERENCES: Materials Science in Semiconductor Processing, 150, 106961 (2022)

K. Annamalai, R. Radha, S. Vijayakumari, S. Balakumar (National Centre for Nanoscience and Nanotechnology, University of Madras, Guindy Campus, Chennai, India)

DN-6