Departments
Prediction of Target Erosion for Planar Magnetron Sputtering Systems
- Department: DSC (НЭОКС)
- Author: Bodnarchuk/Боднарчук V. I., Kolesnikov/Колесников A. G.
- Year: 2022
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DOI:
https://www.mdpi.com/journal/coatings
- REFERENCES: Kolesnikov, A.; Kryukov, Y.; Gafurov, M.; Bodnarchuk, V. Prediction of Target Erosion for Planar Magnetron Sputtering Systems. Coatings 2022, 12, 1807. https://doi.org/10.3390/ coatings12121807
Yury Kryukov (Engineering Centre, Dubna State University, Universitetskaya 19, Dubna 141980, Russia), Marat Gafurov (Institute of Physics, Kazan Federal University, Kremlevskaya 18, Kazan 420008, Russia)
Engineering Centre, Dubna State University, Universitetskaya 19, Dubna 141980, Russia Frank Laboratory of Neutron Physics, Joint Institute for Nuclear Research, Joliot-Curie 6, Dubna 141980, Russia Institute of Physics, Kazan Federal University, Kremlevskaya 18, Kazan 420008, Russia